基于MEMS 的柔性薄膜式动态压力测量带研制
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国家自然科学基金项目(11802114)


Development of Flexible Thin-film Dynamic Pressure Measuring Tape Based on MEMS
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    摘要:

    针对脉动压力测量中测压点布置困难的问题,对柔性薄膜式动态压力测量带进行研制。根据气动测量的 需求,将微机电系统(micro-electro-mechanical system,MEMS)微型动态压力传感器封装在柔性印刷电路板(flexible printed circuit,FPC)柔性衬底基片上,采用Protel99SE 软件完成印制电路板(printed circuit board,PCB)设计。利用 标准翼型在风洞开展研究,通过不同的试验条件,对比柔性薄膜式动态压力测量带和传统嵌入式压力传感器两种方 法的测量结果,验证了柔性薄膜式动态压力测量带的性能。

    Abstract:

    In order to solve the problem of pressure measurement point arrangement in pulsating pressure measurement, a flexible thin-film dynamic pressure measuring tape was developed. According to the requirement of aerodynamic performance measurement, micro-electro-mechanical system (MEMS) micro dynamic pressure sensors are packaged on flexible printed circuit (FPC) flexible substrate, and the printed circuit board (PCB) is designed by Protel99SE software. The standard airfoil is used to carry out the research in the wind tunnel. Through different test conditions, the measurement results of the flexible thin-film dynamic pressure measuring tape and the traditional embedded pressure sensor are compared, and the performances of the flexible thin-film dynamic pressure measuring tape are verified.

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卢翔宇.基于MEMS 的柔性薄膜式动态压力测量带研制[J].,2021,40(9).

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  • 收稿日期:2021-04-30
  • 最后修改日期:2021-06-04
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  • 在线发布日期: 2021-09-22
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